Uses of silicon chrome:

    *  Lithography and approved analytical tools (click for list) - Follow appropriate procedures for photoresist cleaning to ensure against contaminating litho and analytical equipment.
    * Any tools in the Gold-contaminated Equipment Group, except pquest (click for list) - Wafers are considered gold and/or GaAs contaminated following processing in any equipment in this group. Although chrome films may be present on the substrates
    * General-use wet-benches